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Dołączył: 30 Sie 2010
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Wysłany: Czw 22:17, 02 Gru 2010 Temat postu: MAC 88 color eyeshadow Nanopore-based MEMS sensors |
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Nanopore-based MEMS sensors Al2O3 substrate and mechanism of CuCl2/CuPc
Butoxy naphthalocyanine LB film preparation of copper and gas properties. Chem, 20O2,[link widoczny dla zalogowanych], 23 (1) :14-17TheCuCI2 / CuPcsensorbasedonMEMSnanophase-poreA1203baseplateanditsmechanismstudyShiYunbo, GuoJianying, ZhangHongquan, Shiqiang,[link widoczny dla zalogowanych], Anhongliang (CollegeofMeasure.ContmlTechnology & CommunicationEngineering, HarbinUniversityofScienceandTechnology, Harbin150o80) AbstractTakingthe90100BinhollowcolumnAI203filmasthebaseplate. theCuC12/CuPcsensorchipwiththe ∞. 2mmmicrochannelswasdesignedandmanufacturedbyusingMEMSmicro-machiningmethod. Byvacuumcoating,[link widoczny dla zalogowanych], CuCI2hy-bridomamentingCuPcwasevaporatedtoformthegassensitivefilm, andthroughthemicroshellpackagingofit, tIlemi-cmstmcturesensorwasmanufactured. Thismadethedetectingmodeofactiveairsuctionavailiable, andtheresponsetimeandgassensitivityincreased. SEManalysisshowedthatthebettersurfaceaDpearanceandfilmdimensionwereob. tained: theA1203film-baseplateis0.25mminthickness: itsflankisacolumnarcompactbody; itssurfaceappears90-100Binnanophase-poreactivestate. ThePtfilmsusedastheelectrodeandtheheaterare500nminthickness, rangedcolumnarlyanddensely. Dang esensitivefilmis150nminthicknesswithcontinuousandnormalarrangement. Port microshellis150-20opanindepth. ThetestingresultindicatesthatthesensorhaswellsensitivitytoC12. whichismorethan5timesofthatwhentheC1, concentrationis0.01%. Thesensor'sresponsetimeislessthan30s. Theimpactsofaeratingstateandheatingvoltageonthesensor'ssensitivitywereanalyzedandthesensitivemechanismofCuPcorganicsemiconductorwasdiscussed. Keywords: MEMS, A1203nanophase-porecolumn, microshellpackaging, CuPcsensor,[link widoczny dla zalogowanych], gassensitivemechanism a 58 -
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